[mems-talk] BST Etching on MgO

[benabe at mail.usf.edu]

I am currently looking for a lithography recipe for etching BST on MgO. 
My attempts thus far tend to indicate that when using 10:1 BOE solution,
the MgO substrate is also being etched.

Thanks,

EVELYN BENABE
Graduate Research Assistant
RF Microsystems Research Group
University of South Florida