[mems-talk] HELP REQUIRED IN AREA OF ALUMINUM SPUTTERING

[Andrew Sarangan]

Not sure what you mean. Sputtered Aluminum should be a mirror like
surface because it is highly reflective for all visible wavelengths.
If you are not getting a good film I would start by checking the
substrate quality first.


On Mon, May 19, 2008 at 10:40 AM, Brent Garber <garber at engr.uconn.edu> wrote:
> Nataraj,
>
> You will need to provide a little more information as how you are depositing
> the aluminum for anyone to help you.
>
> If you are using DC sputtering, I have found the faster the rate the better.
>
> Brent