[mems-talk] HELP REQUIRED IN AREA OF ALUMINUM SPUTTERING

[Ravikumar_Kuppan]

 Nataraj,
To get  a good reflective layer of Aluminium, I would check the following parameters: Good vacuum in the chamber, substrate quality & the layer on the substrate, the rate of deposition and if required backside heating of the substrate depending on the thickness of the layer to be deposited. 
May be you should give some more information on your process and the substrate which you use to solve the problem.
 
Ravi Kumar.K
 

________________________________

From: mems-talk-bounces at memsnet.org on behalf of Nataraj
Sent: Mon 5/19/2008 3:22 PM
To: mems-talk at memsnet.org
Subject: [mems-talk] HELP REQUIRED IN AREA OF ALUMINUM SPUTTERING



HAI,

        CAN ANY ONE GIVES IDEAS AS HOW TO IMPROVE THE WHITISH COLOR OF
SPUTTERED ALUMINUM, RIGHT NOW MY SPUTTERED AL COLOR IS SILVER IN COLOR, ANY
SUGGESTION TO IMPROVE THE BRIGHTNESS AND COLOR OF IT ?

Regards,

Nataraj Santhanam