[mems-talk] HELP REQUIRED IN AREA OF ALUMINUM SPUTTERING

[walter]

There are,a few possibilities .
In the past I have seen this with my own Al films.
A  the chamber is contaminated
B  the base pressure was not low enough prefer low sis minimum
C  leaks in the chamber like O2.
Is the chamber pumped using diffusion you need an LN trap
If all these areas are covered in theory the film should not look milky
Walter
www.elume.com

----- Original Message ----- 
From: "Nataraj" <nataraj at precico.com.my>
To: <mems-talk at memsnet.org>
Sent: Monday, May 19, 2008 2:52 AM
Subject: [mems-talk] HELP REQUIRED IN AREA OF ALUMINUM SPUTTERING


> HAI,
>
>        CAN ANY ONE GIVES IDEAS AS HOW TO IMPROVE THE WHITISH COLOR OF
> SPUTTERED ALUMINUM, RIGHT NOW MY SPUTTERED AL COLOR IS SILVER IN COLOR, 
> ANY
> SUGGESTION TO IMPROVE THE BRIGHTNESS AND COLOR OF IT ?
>
> Regards,
>
> Nataraj Santhanam
>
>