[mems-talk] PR removal after ICP RIE etching

Satish Yeldandi sathish.yeldandi at gmail.com
Mon May 19 23:00:50 EDT 2008


Hi!

I have problem removing photo resist after using it as mask for
ICP-RIE etching. I tried Acetone, Acetone+Sonication, PR stripper,
Asher. Nothing is working. Did anyone face this problem before. If
anyone has any solution for this problem please tell me.

Thanks
Satish


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