[mems-talk] HELP REQUIRED IN AREA OF ALUMINUM SPUTTERING

[Nataraj]

Dear Mr. Brent,

               Thanks for reply, hope the details furnished below is enough
for your analysis

Power Supply :: PULSED DC POWER SUPPLY, Operating at 60 kHz( avl range 50 to
100 )
Power during deposition ::  12 kW ( operating at Power mode )
vacuum @ chamber during sputtering   :: In the range of  2.0 E-03 torr
Substrate ::      PC ( polycarbonate based plastic ) coated with UV curable
paint( Base coat )
We use oil diffusion pumps with Polycold system
Regards,

Nataraj Santhanam

-----Original Message-----
From: Brent Garber [mailto:garber at engr.uconn.edu]
Sent: Monday, May 19, 2008 10:40 PM
To: nataraj at precico.com.my; General MEMS discussion
Subject: Re: [mems-talk] HELP REQUIRED IN AREA OF ALUMINUM SPUTTERING

Nataraj,

You will need to provide a little more information as how you are
depositing the aluminum for anyone to help you.

If you are using DC sputtering, I have found the faster the rate the better.

Brent