What type of photoresist? On Mon, May 19, 2008 at 11:00 PM, Satish Yeldandi <sathish.yeldandi at gmail.com> wrote: > Hi! > > I have problem removing photo resist after using it as mask for > ICP-RIE etching. I tried Acetone, Acetone+Sonication, PR stripper, > Asher. Nothing is working. Did anyone face this problem before.