Hi all For one of my projects, I need to create some deep holes in a Quartz wafer. I wonder if anybody has experience with etching quartz wafer for >100um depth? Thanks a lot. Best Leo -- Xiaoguang "Leo" Liu Birck Nanotechnology Center, Purdue University, 1205 W.State Street, West Lafayette, IN, 47906 USA liu79 at purdue.edu