[mems-talk] "Serial Communication Error" and STS 310PC

[Adam Sossalla]

Hello all,

does someone know anything about the message "Serial Communication Error" at
a STS 310 PC (PECVD)? The software also does not display the temperature of
the platen and is not able to initialize the machine.

We checked the cable and pc-ports, they're all okay. The The manual does not
list this troubleshooting, so if someone's having an idea or know this
error, I would be really happy.

Thanks a lot and greetings

Adam Sossalla