[mems-talk] PSG Deposition

[乔大勇]

I don't thick 10.5um PSG is achievable and it may crack due to the residual
stress.  In our lab, the maximum thickness is 3um.


ÔÚÄúµÄÀ´ÐÅÖÐÔø¾­Ìáµ½:
>From: "Rana, Mukti M" <mrana at uta.edu>
>To: <mems-talk at memsnet.org>
>Subject: [mems-talk] PSG Deposition
>Date:Thu, 22 May 2008 14:43:18 -0500
>
>Hi,
> 
> We require to deposit 10.5 um thick PSG for using as a sacrificial layer
> by LPCVD. Can anyone tell me about the available foundry services for
> this? If you are a vendor please contact me directly. Thank you.