[mems-talk] PSG Deposition

[Glenn Silveira]

If it is a sacrificial layer PECVD undoped TEOS can be deposited that thick

Best regards,
Glenn   

-----Original Message-----
From: Rana, Mukti M [mailto:mrana at uta.edu]
Sent: Thursday, May 22, 2008 12:43 PM
To: mems-talk at memsnet.org
Subject: [mems-talk] PSG Deposition

Hi,

We require to deposit 10.5 um thick PSG for using as a sacrificial layer
by LPCVD. Can anyone tell me about the available foundry services for
this? If you are a vendor please contact me directly. Thank you.