[mems-talk] Damaging of boats during nickel evaporation

[X.P. Zhu]

Hi,

   I met similar problem when I evaporated Al by
tungsten boat. When Al melted in tungsten boat, the
evaporation rate suddenly reduced and after a while
the boat was "ate" by the melted Al. So I can not
obtain thick Al film. Does anyone know this and give
some hint? Thank you very much.

Zhu X. P.


--- Tolga YELBOGA <yelboga at bilkent.edu.tr>写道:

> Hi;
> You should use tungsten or molybdenium boat for
> nickel or gold. Most
> suitable materials are these because of their
> thermal properties. Alimuna is
> very strong material. But if suddenly temperature to
> be different (hot or
> cold), alimuna will be damaged. 
> 
> Solutions;
> * You can use different type boat that i said that
> * You can evaporate very very slowly (But it can be
> caused of different
> problems.)
> 
>