[mems-talk] Contamination after wet etching

[Rick Williston]

TK

I assume you need the Cr for adhesion. If so, and your contaminant is brownish in colour, try Ti instead if it fits your chemistry. The contaminant likely will disappear as I am just guessing it is a form of chromium hydroxide that can be formed by the presence of humidity and in my case, excess electrical current. I'm wondering if your e-beam litho could have a similar effect. 

Rick Williston