[mems-talk] How to clean silicon wafer after a bad lift-off

[walter]

Greetings,

Although it is possible to clean a wafer that has a bad lift off, it has been 
our experience that usually a faint latent image remains on the wafer.
We just reject those wafers to be replaced with a new one.

engineering at elume.com

----- Original Message ----- 
From: "Shah, Forum N" <forum at exchange.uta.edu>
To: <mems-talk at memsnet.org>
Sent: Tuesday, July 21, 2009 2:10 PM
Subject: [mems-talk] How to clean silicon wafer after a bad lift-off

> Hello All,
>
> Can anyone tell me how to clean the Silicon wafers after doing lift-off 
> process (bad lift-off)? So that I can re-use the wafer. I know we use HF 
> for cleaning the wafers but I am not sure of the exact protocol. Any 
> suggestions would be appreciated.
>
> Thanks
> Forum