[mems-talk] peeling of AZ5214E

[Wilson, Thomas]

Hi Renil,

In case you're already using HDMS prior to spinning your photoresist, I would then suspect the cleanliness of your surfaces. A piranha clean (more involved and dangerous in my opinion) or Summa-Clean (very easy) should help solve your subsequent adhesion problems (AZ5214E) during photolithography/liftoff - A piranha dip once solved an adhesion problem for me that was only noticed for my silicon chips (originally clean) that were stored in plastic chip cases for some months. 


Best regards,

Thomas E. Wilson 
Professor of Physics 
Marshall University 
Science 154 
One John Marshall Drive 
Huntington, WV  25755-2570 
Tel: 304.696.2752 
FAX: 304.696.2494