[mems-talk] anisotropic etching of silicon having aluminium pattern

[tarun mudgal]

Dear all,

I want to fabricate a diaphragm, in that regard i need to etch silicon
anisotropically having aluminum metal pads already patternized on the silicon wafer.

Now, since aluminium also gets etch in TMAH or KOH therefore I am facing a
stalemate.

If anybody has any ideas or suggestions it would be very helpful.

Thanks

Tarun Mudgal