[mems-talk] Silicon_Glass Fusion Bonding

[Xiaoguang Liu]

Hi Bill
Could you elaborate on the plasma bonding process?
Thanks,
Leo

On Tue, Feb 10, 2009 at 3:00 PM, Bill Moffat
<BMoffat at yieldengineering.com> wrote:
> Do you have plasma equipment?  Plasma bonding is possible.  Bill Moffat
>

Xiaoguang "Leo" Liu
Birck Nanotechnology Center,
Purdue University,
1205 W.State Street, West Lafayette, IN, 47906 USA
liu79 at purdue.edu