[mems-talk] hydrophobicity selective patterning

Wu Junjun junjun at twincreekstechnologies.com
Tue Jan 6 15:20:06 EST 2009


Hi All,

I have a silicon surface with patterned hydrophobicity. The  
hydrophilic region consists of 5um tall pillars with metal oxide on  
the top. The dimension of the pillars is around 100um. The hydrophobic  
region is hydrogen terminated bare silicon surface. I'm looking for a  
chemical to spin coat on the surface that will preferentially coat the  
hydrophobic H-terminated silicon and not the hydrophilic metal oxide  
coated pillars. Any suggestions as to which chemicals to try?

Thanks,

Junjun Wu
Twin Creeks Technologies
(cell) 408 - 759 -1426





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