[mems-talk] Vanadium Oxide

[James Paul Grant]

Hello I'm interested in fabricating a microbolometer electromagnetic 
radiation detector.

Extensive research shows that vanadium oxide is one of the best 
materials to use for such a device.

I'm interested if anyone has information on the deposition and 
patterning of  Vanadium Oxide.

Any advice much appreciated.

Many thanks,

Dr. James Paul Grant
Postdoctoral Research Associate
Microsystems Technology Group
76 Oakfield Avenue Room 3
University of Glasgow
Glasgow
Scotland
G12 8LS
Telephone: +44(0)141 330 3374