[mems-talk] methods to hold thin glass wafers

[Shay Kaplan]

How thin? 

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org]
On Behalf Of li shifeng
Sent: Tuesday, July 07, 2009 3:06 PM
To: mems-talk at memsnet.org
Subject: [mems-talk] methods to hold thin glass wafers

Hi, I am working on 4" or 3" thin glass wafers. Because it is thin, glass
wafer is very easy to break during processes. I am looking for any tools or
methods to hold these thin glass wafers.

Thanks!

shifeng