[mems-talk] Storage of developed AZ photoresist

Y.Tian Y.Tian2 at lboro.ac.uk
Fri Jul 10 06:02:59 EDT 2009


Hi All, 

Does anybody have the experience about storage of the wafers with developed AZ photoresist patterns? I just got loads of samples patterned with AZ, but I can not use them immediately. I just have general idea that I should keep them away from UV and keep them dry. Anything specific I should keep in mind? 

Thank you all. 

Yingtao 


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