[mems-talk] How to clean silicon wafer after a bad lift-off

Shah, Forum N forum at exchange.uta.edu
Tue Jul 21 17:10:50 EDT 2009


Hello All,

Can anyone tell me how to clean the Silicon wafers after doing lift-off process (bad lift-off)? So that I can re-use the wafer. I know we use HF for cleaning the wafers but I am not sure of the exact protocol. Any suggestions would be appreciated. 

Thanks
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