[mems-talk] Silicon wet etch with resistivity > 20,000 Ohm/Cm

Moshe moduli0621 at yahoo.com
Sun Jun 7 03:28:38 EDT 2009


Hello
I want to etch Silicon 100 with resistivity > 20,000 Ohm/cm
Is it possible to etch this Silicon type  with KO  solution ?
If yes, 
What is the etch rate ?
Can the fabricate  is V groove ?
 
Thank You, Moshe 
 


      


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