[mems-talk] Uncured SU-8 crack

[Andrew Sarangan]

I tried that, and it didn't work. No amount of baking in a vacuum made much
difference.

However, as the other responder said, if it is due to thermal mismatch of
the metal and the SU8, then active cooling might be an option. I had not
thought of that before, so I am going to give that a try.


On Wed, Mar 18, 2009 at 5:19 PM, Andrea Lucibello <Nonnini at tiscali.it>wrote:

> Hi all,
> and thanks in advance for the suggestions...do you think that is possible
> to bypass the problem making the Post bake in a vacuum oven in order to
> eliminate the outgassing of the uncrosslinked SU-8?What do you if instead of
> Cr i try to deposit the Ti?
>
> Andrea Lucibello

-- 
Andrew Sarangan
Associate Professor
Electro-Optics Graduate Program
University of Dayton
Dayton, OH