[mems-talk] KOH - backside etch - frontside protection

[Chris P. Park]

Hi Andrea,

thanks for your recommendation, I will go along the mechanical wafer support path, yet I received the information about a commercial solution which also allows for built in light source. They do basically what you suggested but their setup is made from PEEK and comes optinally with backside window or a light source (LED's) inside. 

Thanks for your help.

Chris.