[mems-talk] Electrode on PDMS film

memser memser at tom.com
Tue Oct 13 02:55:44 EDT 2009


Hi,

   I need to form an aluminum electrode on PDMS film.
Is it possible (Temperature, ion bombardment) to sputter
(Varian 3180 sputtering system) an aluminum film on the polymer? 

Providing literature about forming electrodes on a PDMS film would also
be appreciated.
 
Thank you very much! 

S. Sougle


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