[mems-talk] Stripping SU-8

David Pierce david.pierce at utdallas.edu
Mon Feb 1 11:33:41 EST 2010


Paul,

I use an oxygen plasma to strip SU-8 and it seems to work well.

David


On Feb 1, 2010, at 10:04 AM, Paul Nguyen wrote:

> Hi all,
> 
> Regarding Su-8 resist, does anyone have experience on how hard to strip this
> resist?  My colleagues have mentioned to me that they have had a hard time
> stripping it.
> 
> Thanks,
> Paul


More information about the MEMS-talk mailing list