[mems-talk] Roughening GaAs substrate

[Andy Irvine]

Thanks Brad and Brent for some good ideas.  I guess mechanical is the 
way to go - I can access the right sort of grinding sludge.

Brad - if you managed that, I take my hat off to you!

Cheers all,

Andy

Brent Garber wrote:
> Andy,
> I can't say I have done this before, but you may find Di : H2O2 : H3PO4  
> (1:4:3) will work for you @ 38 degrees.
> I do it mechanically as I can't have anything happen to my front side.
> Brent