[mems-talk] a substitution for PMMA

[limengyue26]

dear all, 

We are using your Microchem's product - PMMA, the Positive EB resist. But during our microfabrication process, the tempature is not allowed to be higher than 100°C. But the prebaking tempature of PMMA is always 180°C, or ranging from 140°C to 200°C in the data sheet.

The second problem of PMMA is it can not bear severe RIE(reactive ion ething).

Do you have some suggestion about some resist which property is similar to PMMA but can be prebaked at lower tempature, 120°C at most, and of course not higher than 100°C is better. At the same time, it also can have a better performance when RIEed.

Thank you !

limengyue