[mems-talk] Small Silicon Wafer Piece Cleaning

[A.ALLOUCH]

Hi,

Another efficent method is to use Piranha ( H2O2+HESO4    1/1) put the 
H2O2 before the acid in the beaker  and mix for 1 min, then put your 
wafer and wait for 2 mn and you will have very good results.

Alaa

Tony Price a écrit :
> Hi Li,
>
> I work with samples that have similar dimensions.  I typically do a
> USB clean on my samples in acetone and methanol before I do any
> fabrication on them.  Put acetone in a small beaker and submerge your
> samples in the acetone.  Put water in the bath container and then
> place the small beaker of acetone in the water.  (Make sure there
> isn't too much water or the beaker may float around and possible tip
> over.) Then I repeat the process with methanol.  Do not pour the
> acetone and methanol directly into the bath container.
>
> Hope this helps.
>
> Tony

-- 
Alaa el dine ALLOUCH 
Doctorant au LAAS-CNRS-Groupe N2IS
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