[mems-talk] pit under microheater

[RenSen]

hi,
 
For the front side etching, which material do you want to etch, the silicon oxide or the underside silicon?  The most important thing is which process will not damage your microheater. If you just want to etch the silicon oxide under the microheater, you can use HF etc.  If you want to etch the silcon under the microheater to make a big hole, maybe SCREAM process is the best choice.

Ren Sen