[mems-talk] Cleaning optical masks

[Ruiz, Marcos Daniel (SENCOE)]

We have experience problems using O2 ashers on chrome.  Be careful.

Dan

-----Original Message-----
From: mems-talk-bounces+dan.ruiz=honeywell.com at memsnet.org
[mailto:mems-talk-bounces+dan.ruiz=honeywell.com at memsnet.org] On Behalf
Of Andrew Irvine
Sent: Friday, March 26, 2010 7:04 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Cleaning optical masks

Just to re-visit a wise warning from a recent poster, Piranha etch (at 
110C or not) is seriously hazardous, and we need to be flagging up 
safety advice when suggesting stuff.

I don't see a problem with using an oxygen asher, and if there is no 
problem (anyone?), do that instead, Mikas!

Andy