Han, I service equipment for a photomask shop called IC Photomask. They're located in Chandler, AZ. They recently did a mask that had 270 million, 2.5 micron opaque circles in a 4"x4" area of a 5"x5" plate. So I think gray scale masks should be no problem for them. Their number is 480-892-2420 Best Regards, Vic Hi all, > > Does any one know where can I get a gray scale mask to be made? > > Thanks > > regards > > Han > > RMIT University