You can find some information on Silicon sensor and circuits: onc chip
compatibility" in chapter 2
Edited by R.F.Wolffenbuttel, Chapmal Hall 1996


At 11:42 AM 4/26/03 -0500, you wrote:
>Hi,
>Does anyone know a good source (book, review article, etc.) for the
>silicon etch anisotropies (Si(111) versus Si(100)) and oxide etch
>selectivities of KOH, EDP, TMAH, Hydrazine, and related etchants?
>Thanks in advance,
>
>Preston Larson
>
>
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