durusmail: mems-talk: Au etchant
Au etchant
2003-04-30
2003-04-30
equipment
2003-04-30
2003-05-01
Au etchant
Sang Hwui Lee
2003-04-30
Hello,

Does anyone know the recipe of Au etchant or the product name for Au
etchant? I have Au/Cr deposited pyrex glass wafer. now I don't have Au
etchant. Au etchant should not attack Cr layer or interface of Cr/glass
since Au/Cr would be window for glass isotropic etching in BOE.

thanks,

SangHwui Lee
Ph.D candidate/MSE/NJIT
Microelectronics Research Center(MRC)
973-596-6368(O)
201-242-1486(H)





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