Two commercial gold etchants based on KI + I2 are
Cyantek AU-5 and Transene AU-100.
The etch rates are a little different.
I have used AU-5 to etch gold on chrome. The Cr is not etched.
    --Kirt Williams, Ph.D.   consultant

----- Original Message -----
From: Sang Hwui Lee 
To: 
Sent: Wednesday, April 30, 2003 8:46 AM
Subject: [mems-talk] Au etchant


> Hello,
>
> Does anyone know the recipe of Au etchant or the product name for Au
> etchant? I have Au/Cr deposited pyrex glass wafer. now I don't have Au
> etchant. Au etchant should not attack Cr layer or interface of Cr/glass
> since Au/Cr would be window for glass isotropic etching in BOE.
>
> thanks,
>
> SangHwui Lee
> Ph.D candidate/MSE/NJIT
> Microelectronics Research Center(MRC)
> 973-596-6368(O)
> 201-242-1486(H)
>
>
>
>
>
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