durusmail: mems-talk: Quartz or silicon wafer with a poly-silicon layer
Quartz or silicon wafer with a poly-silicon layer
2003-05-01
2003-05-01
2003-05-04
Quartz or silicon wafer with a poly-silicon layer
Zhizhong Yin
2003-05-01
Hi, members,

Anyone knows where could I purchase quartz or silicon wafer with a
poly-silicon layer (about 0.5 um)? for silicon wafer, a isolation SiO2
layer ( > 2 um) between Si and Poly is needed.

Thanks

Zhizhong Yin
Phone#: 410-516-8525(o)          Johns Hopkins University
        410-662-4760(h)          200 Latrobe Hall
email:zzyin@titan.me.jhu.edu     3400 N. Charles Street
homepage:www.me.jhu.edu/~zzyin   Baltimore MD 21218
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