Do not look for any magic behind. There are about 6
ways for gold patterning:
1. lift-off
2. back sputtering (or sputter etch)
3. ion milling
4. aqua regia (mixture of HNO3 and HCl)
5. tri iodine solution (KI + I2)
6. KCN

Details you can find in book "Handbook of metal
Etchants" by CRC press. IN fact, this is one of the
most useful books I have ever seen as there are etch
solution for almost any known combination of metals
and semiconductors.
Regards
Pavel


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Pavel Neuzil
CTO SiMEMS Pte Ltd

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