Dear colleagues, I'm going to use some ultra thin silicon wafers (10-20um). I found meet a basic problem----how can I handle them without making it broken. Any suggestion would be appreciated. Hongjun Zeng ********************************************** Microfabrication Applications Laboratory (MAL) University of Illinois at Chicago ERF Building, 842 W. Taylor Street Chicago, IL 60607-7022 Tel.: 312-413-5889, Fax: 312-996-6465 **********************************************