I don't have experience with this personally, but my understanding is that
CMOS processing of copper is done by forming grooves, electroplating the
copper, and polishing back to the tops of the grooves.  I don't know that a
good anistropic etch exists for copper.

David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org]On Behalf Of HE,Han-Johnny
Sent: Friday, April 25, 2003 8:35 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Anisotropic Cu Wet etching


Hi,
Is there anyone know which etchant is the best one for anisotropic Cu
wet etching or any similar way in good control of Cu good sidewall
definition in terms of wet etching? How to control the etch rate?

I am using Al etchant, but it does not works very well.

Thanks.

Johnny


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