durusmail: mems-talk: PZT patterning
PZT patterning
2003-05-05
PZT patterning
Vittal Sai.P.S
2003-05-05
Hi
 I want to know how to pattern PZT thin film of the order 0.3 to 0.8 micron
thickness.

Thanking you,
Vittal.



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