There is a book called "Alumina As A Ceramic Material" put out by The
American Ceramic Society.  It has some good general information on Alumina
and Alumina coatings.


----- Original Message -----
From: "Louis Chomas" 
To: 
Sent: Tuesday, May 06, 2003 12:05 PM
Subject: [mems-talk] Alumina Etchants


>     I'm trying to etch some alumina films and was wondering if anyone
> had any suggestions for etchants or thoughts on where I could look to
> get some information/data on etching alumina.
>
> Thanks,
> Lou Chomas
>
>
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