The green layer is likely chromium oxide which can be varying shades of
green.  I don't know at what point in your process where this oxidizing is
occurring, but it sounds like that is what is happening.

----- Original Message -----
From: "Carmen" 
To: 
Sent: Wednesday, May 07, 2003 10:01 AM
Subject: [mems-talk] Cr and Au deposition by using sputter


> Hi all,
>
>     I would like to know whether someone who have tried to deposit Cr
> and Au by using sputter and then etched them successfully. I faced the
> problem that the Cr layer cannot be etched completely after etching the
> Au layer, and the color of the Cr layer is not silver, it is like green.
> Is there any reason to cause the Cr layer become green if I use sputter
> to deposit it? Do you have any idea for what the green layer is? (Is it
> a compound or oxide).
> Thank you very much.
>
> Best Regards,
> Carmen
>
>
>
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