durusmail: mems-talk: Materail for Thermal laternal actuator
RE: Anisotropic Cu Wet etching
2003-05-06
2003-05-07
2003-05-07
2003-05-09
Materail for Thermal laternal actuator
2003-05-09
Materail for Thermal laternal actuator
HE,Han-Johnny
2003-05-09
Hi, all,

Just wondering why people prefer using poly-si instead of other mat.
such as metal for typical thermal lateral actuator?

Johnny

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Johnny H.HE,  Ph.D. Candidate
Division of Electrical Engineering, Engineering
Department,Cambridge University,CB2 1PZ, UK
or Downing College, Cambridge, CB2 1DQ ,UK
Email: jh353@cam.ac.uk
Tel:+44 1223 765199 Fax:+44 1223 332662
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