To: Chris Cormeau I was recently doing a search on the Web and ran across your photoresist question regarding coating methods. I see that the memo was written quite awhile ago (Feb. 1996). If you are still looking for alternative coating methods, however, please feel free to contact me. I have worked with several alternative methods to spin coatings, especially on deep features. The chemistry of the photoresist solutions also makes a difference in the surface wetting. Best Regards, Susan Bagen Advanced Process Concepts (972) 527-5028 Phone (972) 517-7928 Fax