durusmail: mems-talk: Photoresist Coating Methods
Photoresist Coating Methods
1997-08-18
1997-09-18
Photoresist Coating Methods
BAGEN@aol.com
1997-08-18
To:  Chris Cormeau

I was recently doing a search on the Web and ran across your photoresist
question regarding coating methods.  I see that the memo was written quite
awhile ago (Feb. 1996).  If you are still looking for alternative coating
methods, however, please feel free to contact me.  I have worked with several
alternative methods to spin coatings, especially on deep features.  The
chemistry of the photoresist solutions also makes a difference in the surface
wetting.

Best Regards,
Susan Bagen
Advanced Process Concepts
(972) 527-5028  Phone
(972) 517-7928  Fax


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