durusmail: mems-talk: cu etching
cu etching
2003-05-19
cu etching
vikas vadloori
2003-05-19
hello
we are trying to etch Cu of thickness 20-25 micron
plated on silicon.we are trying with  HNO3 solution
but under cut occuring
 sugession for improving etching & good side wall
definition required
thankyou in advance for your help
best regards
vikas

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