Prof. Howe and I have collected references of papers written since 1980
which report the mechanical properties of polysilicon, and we have made
them available on the BSAC web site.  These references have been
categorize by the mechanical properties they discuss.  These categories
are:

Stress  (papers dealing with the residual stress or stress gradient of
polysilicon)

Elastic Modulus  (papers reporting the Young's modulus or bi-axial modulus
of polysilicon)

Resonant Quality  (papers reporting the resonant quality or damping ratio
of polysilicon)

Fracture Strength  (papers reporting the fracture stress, strain, or
toughness)

Fatigue  (papers reporting life expectancy or fatigue properties of
polysilicon)

Surface Effects  (papers reporting friction, stiction, or wear properties
of polysilicon).

There is also a collection of papers that report devices made by surface
micromachined polycrystalline silicon.  More detailed information about
the database can be found at its site at

http://www-bsac.eecs.berkeley.edu/~ptjones/database.html


Peter Jones