durusmail: mems-talk: Wafer Curvature Measurements
Wafer Curvature Measurements
2003-05-21
2003-05-21
2003-05-26
2003-05-21
Wafer Curvature Measurements
Robert D White
2003-05-21
I am looking for someone to do some pre- and post- wafer curvature
measurements for estimation of residual stresses evolved during LPCVD
deposition.  I would be doing the LPCVD step myself, and want to send
the wafers somewhere to get the measurements done before and after.
Does anyone offer this service or know where I might look?

Many thanks,

Rob
--
Robert D. White
Graduate Student Research Assistant
Vibrations and Acoustics Lab, 2200 EECS
Mechanical Engineering
University of Michigan
Ann Arbor, MI 48109

(734)936-3824
rdwhite@umich.edu

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