durusmail: mems-talk: Wafer Curvature Measurements
Wafer Curvature Measurements
2003-05-21
2003-05-21
2003-05-26
2003-05-21
Wafer Curvature Measurements
Philip D. Floyd
2003-05-21
Robert,

As I remember Michigan has a great MEMS program.  Why not talk to those
guys?  A little cooperation between departments might not hurt?

Solid State Electronics Lab  http://www.eecs.umich.edu/ssel/index.php


************************************
Philip D. Floyd, Ph.D.
Iridigm Display Corporation
2415 Third Street, Suite 235
San Francisco, CA 94107
ph:  (415) 626-8800 x138
fax: (415) 626-9775
email: pfloyd@iridigm.com
web:  http://www.iridigm.com/
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-----Original Message-----
From: Robert D White [mailto:rdwhite@engin.umich.edu]
Sent: Wednesday, May 21, 2003 7:14 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Wafer Curvature Measurements

I am looking for someone to do some pre- and post- wafer curvature
measurements for estimation of residual stresses evolved during LPCVD
deposition.  I would be doing the LPCVD step myself, and want to send
the wafers somewhere to get the measurements done before and after.
Does anyone offer this service or know where I might look?

Many thanks,

Rob
--
Robert D. White
Graduate Student Research Assistant
Vibrations and Acoustics Lab, 2200 EECS
Mechanical Engineering
University of Michigan
Ann Arbor, MI 48109

(734)936-3824
rdwhite@umich.edu

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