durusmail: mems-talk: Wafer Curvature Measurements
Wafer Curvature Measurements
2003-05-21
2003-05-21
2003-05-26
2003-05-21
Wafer Curvature Measurements
Tun Zainal Zulkifli
2003-05-22
Rob,
Try OERL Lab under Prof. Rode in Washington
University.  His email is dlr@ee.wustl.edu

Regards
Tun

Robert D White  wrote:
I am looking for someone to do some pre- and post-
wafer curvature
measurements for estimation of residual stresses
evolved during LPCVD
deposition. I would be doing the LPCVD step myself,
and want to send
the wafers somewhere to get the measurements done
before and after.
Does anyone offer this service or know where I might
look?

Many thanks,

Rob
--
Robert D. White
Graduate Student Research Assistant
Vibrations and Acoustics Lab, 2200 EECS
Mechanical Engineering
University of Michigan
Ann Arbor, MI 48109

(734)936-3824
rdwhite@umich.edu

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